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Micro-spectrophotometer based on micro electro-mechanical systems technology
ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang
《机械工程前沿(英文)》 2008年 第3卷 第1期 页码 37-43 doi: 10.1007/s11465-008-0001-x
关键词: mini-spectrophotometer referenced micro-silicon-fixer electro-mechanical correlation coefficient
Rainer HORN, Winfried E. H. BLUM
《农业科学与工程前沿(英文)》 2020年 第7卷 第3期 页码 243-245 doi: 10.15302/J-FASE-2020334
Francesco PENTA,Cesare ROSSI,Sergio SAVINO
《机械工程前沿(英文)》 2016年 第11卷 第2期 页码 184-194 doi: 10.1007/s11465-016-0385-y
This study aims to optimize the geometrical parameters of an under-actuated mechanical finger by conducting a theoretical analysis of these parameters. The finger is actuated by a flexion tendon and an extension tendon. The considered parameters are the tendon guide positions with respect to the hinges. By applying such an optimization, the correct kinematical and dynamical behavior of the closing cycle of the finger can be obtained. The results of this study are useful for avoiding the snap-through and the single joint hyperflexion, which are the two breakdowns most frequently observed during experimentation on prototypes. Diagrams are established to identify the optimum values for the tendon guides position of a finger with specified dimensions. The findings of this study can serve as guide for future finger design.
关键词: tendon-driven fingers mechanical finger design under-actuated mechanical systems
《结构与土木工程前沿(英文)》 2021年 第15卷 第5期 页码 1277-1291 doi: 10.1007/s11709-021-1752-2
关键词: cementitious system mineral additive permeability reducing admixture mechanical properties durability performance
王渭源
《中国工程科学》 2000年 第2卷 第3期 页码 36-41
文章评述了影响微电子机械系统(MEMS)成品率和可靠性的粘合力和摩擦力问题。在用氢氟酸(HF)腐蚀牺牲层、释放多晶Si微结构、干燥时,由于Si片表面薄层水的表面张力使两片亲水、间隙在微米量级的a片粘合起来,称为“释放有关粘合”。粘合也发生在封装后器件中,当输入信号过冲时,由于Si片表面的化学状态将Si片粘合起来,称为“使用中粘合”。解决粘合的最好办法是:在MEMS微结构的表面涂以抗粘合薄膜,将成品器件在干燥气氛下封装。介绍了抗粘合薄膜的制备工艺和目前存在的问题。相比之下,具有高速运动的MEMS,其摩擦力问题更为复杂。应用抗粘合薄膜,解决了粘合,也降低了摩擦力,但摩擦依然存在。摩擦带来磨损,降低器件可靠性和寿命。寻找既抗粘合、又耐磨的薄膜,是解决高速运动MEMS可靠性和寿命的一个关键。
Fault evolution-test dependency modeling for mechanical systems
Xiao-dong TAN,Jian-lu LUO,Qing LI,Bing LU,Jing QIU
《信息与电子工程前沿(英文)》 2015年 第16卷 第10期 页码 848-857 doi: 10.1631/FITEE.1500011
关键词: Mechanical systems Design for testability (DFT) Fault evolution-test dependency model (FETDM)
Residual stresses in coating-based systems, part I: Mechanisms and analytical modeling
ZHANG Xiancheng, WU Yixiong, XU Binshi, WANG Haidou
《机械工程前沿(英文)》 2007年 第2卷 第1期 页码 1-12 doi: 10.1007/s11465-007-0001-2
关键词: briefly different thermo-mechanical integrity addition residual
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
《机械工程前沿(英文)》 2013年 第8卷 第2期 页码 146-149 doi: 10.1007/s11465-013-0260-z
To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.
关键词: Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency error sensitivity
《机械工程前沿(英文)》 2023年 第18卷 第2期 doi: 10.1007/s11465-023-0747-1
关键词: micro-electro-mechanical system capacitive sensor bionics operation instability mechanical and electrical decoupling biomedical force measurement
Determination of mechanical parameters for elements in meso-mechanical models of concrete
Xianglin GU, Junyu JIA, Zhuolin WANG, Li HONG, Feng LIN
《结构与土木工程前沿(英文)》 2013年 第7卷 第4期 页码 391-401 doi: 10.1007/s11709-013-0225-7
关键词: concrete meso-mechanical model discrete element method size effect mechanical parameter
《化学科学与工程前沿(英文)》 2023年 第17卷 第9期 页码 1254-1266 doi: 10.1007/s11705-023-2297-3
关键词: epoxy resin polyaniline nanorods mechanical property tribological performance wear mechanism
Thermo-mechanical simulation of frost heave in saturated soils
《结构与土木工程前沿(英文)》 页码 1400-1412 doi: 10.1007/s11709-023-0990-x
关键词: frost heave multiphysics analysis thermo-mechanical approach saturated soils
Electronic and mechanical responses of two-dimensional HfS
Mohammad SALAVATI
《结构与土木工程前沿(英文)》 2019年 第13卷 第2期 页码 486-494 doi: 10.1007/s11709-018-0491-5
Experimental study on compaction-induced anisotropic mechanical property of rockfill material
Xiangtao ZHANG, Yizhao GAO, Yuan WANG, Yu-zhen YU, Xun SUN
《结构与土木工程前沿(英文)》 2021年 第15卷 第1期 页码 109-123 doi: 10.1007/s11709-021-0693-0
关键词: rockfill inclination of specimen preparation anisotropy mechanical property mechanism
《能源前沿(英文)》 2023年 第17卷 第5期 页码 569-584 doi: 10.1007/s11708-023-0875-7
关键词: lithium (Li)-ion battery (LIB) Li metal battery three-dimensional (3D) composite Li metal anode mechanical modification reducing local current density
标题 作者 时间 类型 操作
Micro-spectrophotometer based on micro electro-mechanical systems technology
ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang
期刊论文
Effect of land-use management systems on coupled physical and mechanical, chemical and biological soil
Rainer HORN, Winfried E. H. BLUM
期刊论文
Analysis of suitable geometrical parameters for designing a tendon-driven under-actuated mechanical finger
Francesco PENTA,Cesare ROSSI,Sergio SAVINO
期刊论文
Effect of mineral additives and permeability reducing admixtures having different action mechanisms on mechanicaland durability performance of cementitious systems
期刊论文
Fault evolution-test dependency modeling for mechanical systems
Xiao-dong TAN,Jian-lu LUO,Qing LI,Bing LU,Jing QIU
期刊论文
Residual stresses in coating-based systems, part I: Mechanisms and analytical modeling
ZHANG Xiancheng, WU Yixiong, XU Binshi, WANG Haidou
期刊论文
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
期刊论文
A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow
期刊论文
Determination of mechanical parameters for elements in meso-mechanical models of concrete
Xianglin GU, Junyu JIA, Zhuolin WANG, Li HONG, Feng LIN
期刊论文
Facile synthesis of polyaniline nanorods to simultaneously enhance the mechanical properties and wear
期刊论文
Experimental study on compaction-induced anisotropic mechanical property of rockfill material
Xiangtao ZHANG, Yizhao GAO, Yuan WANG, Yu-zhen YU, Xun SUN
期刊论文